The infrared emission spectrum of SiN between 2.2 and 4.4 μm

M. Elhanine; B. Hanoune; G. Guelachvili; C. Amiot

doi:doi:10.1051/jp2:1992176

Numéro		J. Phys. II France Volume 2, Numéro 4, April 1992


Page(s)		931 - 938
DOI		https://doi.org/10.1051/jp2:1992176

DOI: 10.1051/jp2:1992176
J. Phys. II France 2 (1992) 931-938

The infrared emission spectrum of SiN between 2.2 and 4.4 $\mu$ m

M. Elhanine¹, B. Hanoune¹, G. Guelachvili¹ and C. Amiot²

¹ Laboratoire de Physique Moléculaire et Applications, UPR 136, Université de Paris-Sud, Bât. 350, 91405 Orsay, France
² Laboratoire Aimé Cotton, CNRS II, Université de Paris-Sud, Bât. 505, 91405 Orsay, France

(Received 20 December 1991, accepted 21 January 1992)

Abstract
The emission spectrum of a plasma of silane and nitrogen, excited by a radio frequency discharge, has been recorded with a high resolution Fourier transform spectrometer. We report here the first observation by IR spectroscopy of the X $^2 \Sigma^+ (v=1, 2)$ and A $^2 \Pi_{\rm i} (v=2, 3, 4)$ vibrational levels of ²⁸Si ¹⁴N, through the observation of 724 unperturbed transitions of the (1-0), (2-0), (2-1), (3-1), and (4-2) vibronic bands of the A $^2 \Pi_{\rm i}$ - X $^2 \Sigma^+$ system of this radical. The data were analyzed in a least squares fit procedure, with a standard deviation equal to $6\times10^{-4}$ cm ^-1.

The infrared emission spectrum of SiN between 2.2 and 4.4 m

The infrared emission spectrum of SiN between 2.2 and 4.4 $\mu$ m